Immersion photolithography system and method using inverted...

Details Immersion photolithography system and method using inverted... Immersion photolithography system and method using inverted...

2011-03-01

2011-03-01

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

Reexamination Certificate

active

07898643

ABSTRACT:
A liquid immersion photolithography system includes an exposure system that exposes a substrate with electromagnetic radiation, and also includes an optical system that images the electromagnetic radiation on the substrate. A liquid is between the optical system and the substrate. The projection optical system is positioned below the substrate.

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