Immersion optical system and optical apparatus having the same

Details Immersion optical system and optical apparatus having the same Immersion optical system and optical apparatus having the same

2007-04-03

2007-04-03

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

Fluid

Reexamination Certificate

active

11319195

ABSTRACT:
An immersion optical system that condenses light from a light source toward a first surface includes a lens having a concave lens surface closest to the first surface, a liquid being filled in a space between the concave lens surface and the first surface, wherein a conditional equation d>L/[2×tan {arcsin(NA
i)}] is met, where d is a distance between a first point and a second point when the distance becomes maximum between the first point on the concave lens surface and the second point on the first surface in a direction substantially orthogonal to the first surface, L/2 is a maximum distance from the second point to an edge of an irradiation area of the light on a first surface, NA is a numerical aperture of the immersion optical system, and ni is a refractive index of the liquid.

REFERENCES:
patent: 2000-58436 (2000-02-01), None
patent: WO 2005/059654 (2005-06-01), None
Smith, Bruce W., et al. “Approaching the numerical aperture of water—Immersion lithography at 193nm,” Rochester Institute of Technology, Microelectronic Engineering Department, 12 pages.

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