Measuring and testing – With fluid pressure – Dimension – shape – or size
Reexamination Certificate
2006-11-28
2006-11-28
Williams, Hezron (Department: 2856)
Measuring and testing
With fluid pressure
Dimension, shape, or size
Reexamination Certificate
active
07140233
ABSTRACT:
The present invention is directed to an immersion lithography proximity sensor having a nozzle shroud with a flow curtain. The immersion lithography proximity sensor includes a shroud that affixes to the nozzle. A plenum is located inside the shroud that holds a shroud liquid, which is fed into the plenum through one or more intake holes. The shroud liquid is emitted out through a series of openings, such as holes or slots, along a bottom surface of the shroud in a direction away from the nozzle. The shroud liquid that is emitted forms a curtain around the nozzle to prevent cross currents from impacting the flow of liquid out of the nozzle.
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ASML Holding N.V.
Fitzgerald John
Sterne Kessler Goldstein & Fox PLLC
Williams Hezron
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