Immersion lithography apparatus and method of performing...

Details Immersion lithography apparatus and method of performing... Immersion lithography apparatus and method of performing...

2011-05-24

2011-05-24

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07948607

ABSTRACT:
An immersion lithography apparatus includes an optical system having a liquid delivery unit. The liquid delivery unit is arranged to deliver a layer of an immersion liquid onto a surface of a wafer as well as an annulus of a barrier liquid adjacent an exterior wall of the immersion liquid. The presence of the barrier liquid prevents ingress to the immersion liquid of a gas external to the immersion liquid.

REFERENCES:
patent: 6954256 (2005-10-01), Flagello et al.
patent: 7317507 (2008-01-01), Straaijer
patent: 2003/0107184 (2003-06-01), Platner
patent: 2004/0038060 (2004-02-01), Kawakami et al.
patent: 2005/0094116 (2005-05-01), Flagello et al.
patent: 2005/0094119 (2005-05-01), Loopstra et al.
patent: 2005/0122505 (2005-06-01), Miyajima
patent: 2005/0168713 (2005-08-01), Vogel et al.
patent: 2008/0304026 (2008-12-01), Yamashita
patent: 1816671 (2007-08-01), None
patent: 1494079 (2008-01-01), None
patent: 1571698 (2008-06-01), None

Affiliated with

Also associated with

Rating

Immersion lithography apparatus and method of performing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Immersion lithography apparatus and method of performing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Immersion lithography apparatus and method of performing... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2649428