Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-07-19
2011-07-19
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
Reexamination Certificate
active
07982850
ABSTRACT:
In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas seal is formed between said structure and the surface of said substrate to contain liquid in the space.
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patent:
De Smit Joannes Theodoor
Derksen Antonius Theodorus Anna Maria
Hoogendam Christiaan Alexander
Kolesnychenko Aleksey
Lof Joeri
ASML Netherlands B.V.
Glick Edward J
Liu Chia-how Michael
Pillsbury Winthrop Shaw & Pittman LLP
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