Immersion exposure technique

Details Immersion exposure technique Immersion exposure technique

2008-07-31

2009-11-17

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S055000, C355S072000

Reexamination Certificate

active

07619714

ABSTRACT:
An exposure apparatus which has a projection optical system and exposes a substrate to a pattern of an original through the projection optical system with a gap between the projection optical system and the substrate filled with a liquid. The apparatus includes (a) a stage configured to hold the substrate and to be moved, and (b) a nozzle structure arranged around the final surface of the projection optical system and having first and second surfaces opposite to a surface of the substrate held by the stage, the first surface being arranged inside the second surface and different from the second surface in a distance from the surface of the substrate. The nozzle structure includes (i) a supply port configured to supply a liquid to the gap, and (ii) a recovery port, arranged on the first surface and outside the supply port, and configured to recover a liquid from the gap.

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