Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-01-18
2011-01-18
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S072000
Reexamination Certificate
active
07872730
ABSTRACT:
An immersion type exposure apparatus comprises: an optical member from which an exposure beam is emitted; a first movable member that is movable while holding a substrate, in a predetermined region including a first region including a position facing the optical member and a second region different from the first region; a second movable member that is movable while holding the substrate independently from a first movable member, in a predetermined region including the first region and the second region; a first connection member that is releasably and alternately connected with the first movable member and the second movable member, and moves one movable member in the first region; a second connection member that is releasably and alternately connected with the first movable member and the second movable member, and moves the other movable member in the second region; and a third movable member that is provided on the first connection member and is movable to a position facing the optical member, and at least one of the first movable member, the second movable member, and the third movable member is moved to the position facing the optical member so that a beam path on the emitting side of the optical member is kept filled with a liquid.
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Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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