Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2008-06-04
2011-10-11
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000
Reexamination Certificate
active
08035796
ABSTRACT:
An immersion exposure apparatus which exposes a substrate through a liquid includes an illumination optical system, a projection optical system, a chuck, a liquid support plate, a stage, and a liquid repellency recovery unit. The illumination optical system illuminates an original with exposure light from exposure light sources. The projection optical system projects a pattern of the original onto the substrate. The chuck holds the substrate. The liquid support plate supports a liquid together with the substrate held by the chuck. A surface of the liquid support plate includes a surface of a metal oxide. The stage is provided with a chuck and the liquid support plate and is movable. The liquid repellency recovery unit is configured to recover the liquid repellency of the surface of the metal oxide with regard to the liquid.
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Masahiro Miyauchi; Nobuo Kieda; Shunichi Hishita; Takefumi Mitsuhashi; Akira Nakajima; Toshiya Watanabe; Kazuhito Hashimoto; “Reversible wettability control of TiO2 surface by light irradiation”; Surface Science; 511; pp. 401-407; 2002.
Canon Kabushiki Kaisha
Canon USA Inc IP Division
Kim Peter B
Riddle Christina
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