Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-08-02
2011-08-02
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
Reexamination Certificate
active
07990517
ABSTRACT:
A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.
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patent:
Horiuchi Takashi
Takaiwa Hiroaki
Kim Peter B
Liu Chia-how Michael
Nikon Corporation
Oliff & Berridg,e PLC
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