Imaging XPS system

Details Imaging XPS system Imaging XPS system

1992-07-01

1994-02-08

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250397, H01J 4700

Patent

active

052850668

ABSTRACT:
A simple imaging XPS (X-ray photoelectron spectrometry) system using a coaxial spherical sector electron energy analyzer. The system can obtain a two-dimensional photoelectron image of the analyzed sample surface. The energy analyzer (1) includes an input slit (11) extending in the y-direction. An image representing the distribution of the energies of photoelectrons ejected from the sample (S) is focused onto the input slit (11) by an input lens system (5). Only photoelectrons passed through the slit (11) are analyzed by the analyzer (1) and detected by a multichannel detector (12) disposed at least in the y-direction in the focal plane of the analyzer. A pair of deflection plates (10) capable of deflecting the image representing the distribution in the x-direction are mounted within the input lens system (5). Photoelectrons distributed in the y-direction are detected simultaneously by the detector (12). Photoelectrons distributed in the x-direction are successively detected by means of the deflection of the deflection plates (10). Thus, a two-dimensional photoelectron image of the sample is obtained.

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