Imaging scatterometer

Details Imaging scatterometer Imaging scatterometer

1997-10-10

1999-06-15

Kim, Robert H.

Optics: measuring and testing

Of light reflection

356446, G01N 2155, G01N 2147

Patent

active

059127414

ABSTRACT:
A scatterometer for providing measurements of the directional energy distribution of radiation reflected from the surface of a sample material as two-dimensional images, the images being representative of surface characteristics of the sample material, as viewed from different directions, without moving the sample material being examined, is disclosed. The scatterometer comprises a radiation source, a first reflector, a second reflector, a detector and a beam steerer.

REFERENCES:
patent: 1979952 (1934-11-01), Benford
patent: 4360275 (1982-11-01), Louderback
patent: 4412746 (1983-11-01), Yokouchi
patent: 4547073 (1985-10-01), Kugimiya
patent: 4555635 (1985-11-01), Yoshida
patent: 4673818 (1987-06-01), Guerra
patent: 4815858 (1989-03-01), Snail
patent: 4859062 (1989-08-01), Thurn et al.
patent: 4954722 (1990-09-01), Fine et al.
patent: 4988205 (1991-01-01), Snail
patent: 5196906 (1993-03-01), Stover et al.
patent: 5241369 (1993-08-01), McNeil et al.
patent: 5637873 (1997-06-01), Davis et al.

Affiliated with

Also associated with

Rating

Imaging scatterometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Imaging scatterometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Imaging scatterometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-406131