Imaging optical system evaluation method, imaging optical...

Details Imaging optical system evaluation method, imaging optical... Imaging optical system evaluation method, imaging optical...

2006-09-05

2006-09-05

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S077000

Reexamination Certificate

active

07102728

ABSTRACT:
The evaluation method comprises a step (S11) of setting an aberration polynomial that generally expresses the aberration of the imaging optical system as a function of the image plane coordinates and pupil coordinates, a measurement step (S12) of measuring the wavefront aberration of the imaging optical system for a plurality of points in the image plane of the imaging optical system, an approximation step (S13) of approximating a specified polynomial as a function of the pupil coordinates to the wavefront aberration obtained in the measurement step, and a step (S14) of determining the coefficients of the respective terms of the aberration-polynomial on the basis of the coefficients of the respective terms in the specified polynomial obtained in the approximation step.

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