Imaging optical system configured with through the lens...

Details Imaging optical system configured with through the lens... Imaging optical system configured with through the lens...

2006-10-05

2009-11-03

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S489000

Reexamination Certificate

active

07612892

ABSTRACT:
A new and useful imaging concept is provided that is designed to improve the manner in which control information for an imaging optical system such as a lithographic imaging optical system can be generated. An imaging optical system comprises imaging optics defining a primary optical path along which a primary image is imaged, and a measurement optical path is established and includes at least part of the primary optical path. The imaging optical system is configured to obtain information from the measurement optical path for use in providing control information for the imaging optical system. Such a system is particularly useful for measuring the topography of a large region of the surface under investigation, like the entire instantaneous field of a wafer, instead being limited to a small patch or set of patches.

REFERENCES:
patent: 5268744 (1993-12-01), Mori et al.
patent: 5434425 (1995-07-01), Ishiyama
patent: 6285455 (2001-09-01), Shiraishi
patent: 6320658 (2001-11-01), Mizutani
patent: 7253885 (2007-08-01), Matsumoto

Affiliated with

Also associated with

Rating

Imaging optical system configured with through the lens... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Imaging optical system configured with through the lens..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Imaging optical system configured with through the lens... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4131495