Imaging optical system and exposure apparatus

Details Imaging optical system and exposure apparatus Imaging optical system and exposure apparatus

2006-07-07

2008-10-14

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C355S053000

Reexamination Certificate

active

07435984

ABSTRACT:
An imaging optical system for imaging a pattern of an object plane onto an image plane includes a first imaging optical system for imaging at a first imaging position, the first imaging optical system having a magnification α in a vacuum atmosphere, and a second imaging optical system for imaging at a second imaging position, the second imaging optical system having a magnification β in the vacuum atmosphere, wherein when an environment in which the imaging optical system is placed changes from the vacuum atmosphere to an air atmosphere or vise versa, a direction of the first imaging position that moves along an optical axis is opposite to a direction of the second imaging position that moves along the optical axis.

REFERENCES:
patent: 6665049 (2003-12-01), Takahashi
patent: 2001/0006413 (2001-07-01), Burghoorn
patent: 2003/0081213 (2003-05-01), Oishi et al.
patent: 11-271604 (1999-10-01), None
patent: 2001-217191 (2001-08-01), None

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