Imaging method

Details Imaging method Imaging method

2006-12-26

2006-12-26

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C355S067000

Reexamination Certificate

active

07154674

ABSTRACT:
An optical image is formed in a radiation-sensitive layer (5), by a number of sub-illuminations, in each of which an array of light valves (21–25) and a corresponding array of converging elements (91–95) are used to form a pattern of spots (111–115) in the resist layer in accordance with a sub-image pattern. Between the sub-illuminations, the resist layer is displaced relative to the arrays. Bright and well-defined spots are obtained by using effective lenses (43) as converging elements. The radiation-sensitive layer may be a resist layer on top of a substrate wherein a device is to be configured by means of lithography or an electrostatic charged layer used in a printer.

REFERENCES:
patent: 4838652 (1989-06-01), Inaba et al.
patent: 2002/0159044 (2002-10-01), Mei et al.

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