Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1990-12-20
1993-11-30
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
With detector
250396R, 250305, 250306, 250307, H01J 3726
Patent
active
052668096
ABSTRACT:
Imaging electron-optical apparatus, e.g. photo-electron emission microscope, which has an electron-optical imaging system in which electrons of an electron pattern to be imaged are accelerated to a maximum energy of at least several 10.sup.3 electron volts and a real image of said electron pattern is produced in an image plane, and further has a channel-plate image intensifier which receives and amplifies the electrons which form the real image; the image intensifier has a luminescence screen positioned in the path of the amplified electrons. A decelerating electrostatic lens is provided in the path of the electrons before they enter the image intensifier, to produce an electrical field which reduces the energy of the electrons which enter the image intensifier; the energy is reduced to a value at which said channel-plate electron intensifier has a higher sensitivity or gain than with the maximum acceleration energy in the imaging system.
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Berman Jack I.
Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
Nguyen Kiet T.
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