Imaging device in a projection exposure facility

Details Imaging device in a projection exposure facility Imaging device in a projection exposure facility

2007-12-04

2007-12-04

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S067000, C359S823000

Reexamination Certificate

active

10250495

ABSTRACT:
An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

REFERENCES:
patent: 2001/0038500 (2001-11-01), Shibazaki

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