Imaging device in a projection exposure facility

Details Imaging device in a projection exposure facility Imaging device in a projection exposure facility

2011-06-14

2011-06-14

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S067000

Reexamination Certificate

active

07961294

ABSTRACT:
An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

REFERENCES:
patent: 4961001 (1990-10-01), Liegel et al.
patent: 5822133 (1998-10-01), Mizuno et al.
patent: 5923473 (1999-07-01), Kelley et al.
patent: 5986827 (1999-11-01), Hale
patent: 6150750 (2000-11-01), Burov et al.
patent: 2001/0038500 (2001-11-01), Shibazaki
patent: 2003/0226976 (2003-12-01), Tanaka
patent: 2004/0042094 (2004-03-01), Matsuyama
patent: 37 33 823 (1989-04-01), None
patent: 197 15 226 (1998-10-01), None
patent: 199 10 295 (2000-09-01), None
patent: 199 10 947 (2000-09-01), None
patent: 0 360 975 (1990-04-01), None
patent: 1 311 007 (2003-05-01), None
patent: 2316222 (1998-02-01), None
patent: 3064372 (1992-05-01), None
patent: WO 03/052511 (2003-06-01), None
patent: WO 2007/071353 (2007-06-01), None
Office Action for corresponding Application No. EP 02 798 340.2, dated Aug. 9, 2010.
Office Action for corresponding Application No. EP 02 798 340.2, dated May 25, 2009.
Pohl, “Dynamic piezoelectric translation devices,” Review of Scientific Instruments, 58(1):54-57, 1987.
Von Randow, “It's Time to Jerk the Tablecloth Off the Table,” Zeit Online, 23/2004 p. 43 [http://www.zeit.de/2004/23/I-Attocube] (English translation).

Affiliated with

Also associated with

Rating

Imaging device in a projection exposure facility does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Imaging device in a projection exposure facility, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Imaging device in a projection exposure facility will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2728948