Imaging device and method for high-sensitivity optical...

Details Imaging device and method for high-sensitivity optical... Imaging device and method for high-sensitivity optical...

2011-03-01

2011-03-01

Epps, Georgia Y (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

C250S214100, C250S2140RC, C348S294000, C348S295000

Reexamination Certificate

active

07897902

ABSTRACT:
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.

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