Imaging apparatus

Details Imaging apparatus Imaging apparatus

2002-11-27

2008-05-27

Ahmed, Samir (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C355S053000, C378S034000

Reexamination Certificate

active

07379579

ABSTRACT:
An imaging apparatus having an illuminator configured to condition a beam of radiation having a wavelength equal to or shorter than 365 nm; a support structure to support a programmable patterning device, the programmable patterning device configured to pattern the beam according to a desired pattern; a substrate table configured to hold a substrate; a projection system configured to project the patterned beam onto a target portion of the substrate; a beam splitter located between the programmable patterning device and the substrate table configured to divert aside a portion of the patterned beam; and an image detector configured to analyze the portion of the patterned beam.

REFERENCES:
patent: 5098191 (1992-03-01), Noguchi et al.
patent: 5142132 (1992-08-01), MacDonald et al.
patent: 6278514 (2001-08-01), Ohsaki
patent: 6507388 (2003-01-01), Burghoorn
patent: 0 552 953 (1993-07-01), None
patent: 2 049 964 (1980-12-01), None
patent: 2 049 964 (1980-12-01), None
patent: WO 92/11567 (1992-07-01), None

Affiliated with

Also associated with

Rating

Imaging apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Imaging apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Imaging apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3981946