Photocopying – Projection printing and copying cameras – Image transferred from individual documents to film strip
Reexamination Certificate
2006-04-04
2006-04-04
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Image transferred from individual documents to film strip
C355S053000, C355S030000, C355S077000
Reexamination Certificate
active
07023525
ABSTRACT:
An imaging apparatus according to one embodiment of the invention includes a programmable patterning structure configured to pattern a projection beam of radiation according to a desired pattern. The programmable patterning structure includes a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam. At least one of the separate patterning sub-elements is configured to generate a patterned sub-beam whose cross-section contains regions of different intensities. The imaging apparatus also includes a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, and a projection system configured to project the patterned image onto a target portion of a substrate.
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Bleeker Arno Jan
De Jager Pieter Willem Herman
Hintersteiner Jason Douglas
Kruizinga Borgert
McCarthy Matthew Eugene
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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