Image sensor and method of making

Details Image sensor and method of making Image sensor and method of making

1986-06-06

1987-10-06

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

250578, H01V 4014

Patent

active

046984941

ABSTRACT:
The invention provides a contact image sensor in which a common electrode is provided so as to oppose a plurality of individual electrodes arranged on a substrate across a photoconductive semiconductor film, characterized in that each of the individual electrodes is in contact with the semiconductor film through a window provided at a predetermined position in an insulating film. The insulating film can be made of a photosensitive resin, in which case the windows are formed by light exposure and development. Preferably, the insulating film is baked at an elevated temperature to purge impurities therefrom. The invention also provides image sensors in which the common electrode layer is made of an electrically conductive resin. Such resin electrodes overcome short-circuiting problems due to pinhole defects in the semiconductor film and can be used in known image sensor structures or in concert with the novel image sensor structure of the invention wherein the individual electrodes contact the semiconductor film through a window in an insulating layer.

REFERENCES:
patent: 4575638 (1986-03-01), Okumura
patent: 4650984 (1987-01-01), Furushima et al.

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