Image searching defect detector

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C382S145000, C356S237100

Reexamination Certificate

active

07127099

ABSTRACT:
An image of an article to be inspected is divided into image portions, and a search engine makes a comparison with the image portion and a library of reference images. The reference images have predetermined labels that indicate whether each indicates a defect or no defect. The one of the reference images that most closely matches the image portion is determined, and the label associated with the reference image is taken as indicating whether the image portion corresponds to a location with a defect or no defect. Locations indicated as being defective are considered candidate defects and may subsequently be inspected in more detail.

REFERENCES:
patent: 4928313 (1990-05-01), Leonard et al.
patent: 5023916 (1991-06-01), Breu
patent: 6148099 (2000-11-01), Lee et al.
patent: 6175417 (2001-01-01), Do et al.
patent: 6185511 (2001-02-01), Steffan et al.
patent: 6222935 (2001-04-01), Okamoto
patent: 6363167 (2002-03-01), Miyano et al.
patent: 6452677 (2002-09-01), Do et al.
patent: 6614924 (2003-09-01), Aghajan
patent: 6757421 (2004-06-01), Kubo
patent: 6771806 (2004-08-01), Satya et al.
patent: WO 98/14892 (1998-04-01), None
patent: WO 99/01842 (1999-01-01), None
patent: WO 99/67626 (1999-12-01), None
patent: WO 00/03234 (2000-01-01), None
patent: WO 00/28473 (2000-05-01), None
patent: WO 00/73994 (2000-12-01), None
patent: WO 00/79472 (2000-12-01), None
Haruo Yoda et al., “An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques”, IEEE Transaction on pattern analysis and machine intelligence, vol. 10, No. 1, Jan. 1988,pp. 4-16.
Haruo Yoda“an automatic wafer inspection system using pipelined image processing techniques”. IEEE transcation on pattern analysis and machine intelligence. vol. 10, No. 1, Jan. 1988.
Brochure:SK-75™ AOI Inspection System, Advanced Inspection for Process Sampling and Volume Production, Orbotech Ltd.
Product Information on SK-75™ AOI Inspection System, Orbotech Ltd., Orbotech Website: http:www.Orbotech.com/products—mi—sk75.html.
Brochure:INSPIRE-9060™ Specifications, Orbotech Ltd.
Product Information on INSPIRE-9000™ Automated Optical Inspection System, Orbotech Ltd., Orbotech Website: http:www.Orbotech.com/products—mi—inspire9000.html.
Shimon Cohen et al.,Automatic model selection in a hybrid perception/radical network, Computer Science Dept., Tel-Aviv University, Nov. 15, 2001, pp. 1-23.
Shimon Cohen et al.,Forward and backward selection in regression hybrid network, Computer Science Dept., Tel-Aviv University, pp. 1-10.
Chou et al.,Automatic defect classification for semiconductor manufacturing, Machine Vision and Applications 9: 201-214 (1997).
Brzakovic et al.,Designing a defect classification system: a case study, Pattern Recognition, vol. 29, No. 8, pp. 1401-1419, 1996.
Choon-Woo Kim et al.,Hierarchical classification of surface defects on dusty wood boards, Pattern Recognition Letters 15, pp. 713-721, Jul. 1994.
Hennessey et al.,Integrated Defect Management Using a Knowledge-Based Approach, Semiconductor International, vol. 19, No. 11 (1996) pp. 177-184.
Breaux et al.,Automatic defect classification for effective yield management, Solid State Technology, Dec. 1996, pp. 89-96.
Chen-Ting Lin et al.,Defect Reduction in a High-Volume Fab, Semiconductor International, Jul. 2001, pp. 159-166.
Byron et al.,Recent advances in the automatic inspection of integrated circuits for pattern defects, Machine Vision and Applications 8: pp. 5-19, 1995.
Petra Pemer,A knowledge-based image-inspection system for automatic defect recognition, classification, and process diagnosis, Machine Vision and Applications 7: pp. 135-147, 1994.
Operation Manual:Defect Classification Station, KLA-Acrotec, Version 1.0 & 2.0, Jul. 1, 1998.
S. Cohen and N. Intrator,A hybrid projection based and radial basis function architecture, School of Computer Science, Tel-Aviv University, Israel, pp. 1-15, Oct. 2001.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Image searching defect detector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Image searching defect detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Image searching defect detector will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3681117

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.