Image reversal process for self-aligned implants in planar epita

Details Image reversal process for self-aligned implants in planar epita Image reversal process for self-aligned implants in planar epita

1992-12-22

1993-11-30

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

148DIG72, 257515, 257517, H01L 21265, H01L 2970

Patent

active

052665054

ABSTRACT:
An image reversal process for self-aligned implants in which a mask opening and plug in the opening are used to enable one implant in the mask opening, another self-aligned implant in the region surrounding the opening, and a self-aligned electrode to be formed in the opening.

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