Image recognition apparatus capable of inspecting height and met

Details Image recognition apparatus capable of inspecting height and met Image recognition apparatus capable of inspecting height and met

1994-10-21

1997-04-15

Johns, Andrew

Image analysis

Applications

Manufacturing or product inspection

356376, G06K 900

Patent

active

056218141

ABSTRACT:
An image recognition apparatus with which rapid height discrimination can be performed for a large number of small protrudent objects disposed on a substrate, and further a height inspecting method with the use of the image recognition apparatus, are disclosed. Two slit incident beams having been emitted from an illuminant and passed through slits fall on an object to be inspected each at an incident angle from the direction perpendicular to the surface of the object to be inspected. There are irregularities of objects to be detected on the object to be inspected. The slit beams are intercepted by protrudent parts of the objects to be detected, so that the morphologies of bright lines produced on the surface of the object to be inspected are changed depending on the heights of the objects to be detected. An image of the bright lines is picked up by a television camera, and the resultant signal is compared with an image signal previously stored. Thus, whether or not the heights of the objects to be detected fall within a given range can be discriminated.

REFERENCES:
patent: 4573073 (1986-02-01), Corby, Jr.
patent: 4653104 (1987-03-01), Tamura
patent: 4696047 (1987-09-01), Christian et al.
patent: 4731853 (1988-03-01), Hata et al.
patent: 5243405 (1993-09-01), Tichenor et al.
patent: 5243665 (1993-09-01), Maney et al.
patent: 5280542 (1994-01-01), Ozeki et al.

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