Image reading device with moisture resistant layer

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357 32, 357 52, 357 72, 357 73, H01L 2714

Patent

active

049242822

ABSTRACT:
An image reading device has an entrance window provided in a substrate and receiving the light illuminating an information bearing member bearing information to be read. A photosensor is provided on the substrate for receiving the light that has entered through the entrance window and has been reflected by the information bearing member. Further, a protective layer is formed on the photosensor opposite to the substrate, in order to maintain a constant distance between the information bearing member and the photosensor, and has a multi-layer structure of separate functions, comprising a first layer of a first function at the side of photosensor, and a second layer of another function different from the first function.

REFERENCES:
Applied Physics A. Solids and Surfaces, vol. A34, No. 3, Jul. 1984, 175-178, Snell, A., et al., A New Vertically Integrated Amorphous Silicon Amorphous Silicon Addressable Image Sensor.
Athanos, "Developments of COS/MOS Technology", Solid-State Technology, Jun. 1974, pp. 54-59.
Poponiak et al. "Thick Wear Resistant Coatings for Silicon Devices", IBM Technical Disclosure Bulletin, vol. 18, No. 12, May 1976, p. 4008.
Barile et al, "Removal of Mobile Sodium from Silicon Dioxide", IBM Technical Disclosure Bulletin, vol. 13, No. 5, Oct. 1970, p. 1114.

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