Image reading device, and inspection apparatus and exposure appa

Image analysis – Image enhancement or restoration – Artifact removal or suppression

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382321, G06K 900

Patent

active

058156070

ABSTRACT:
An image reading device for detecting a foreign object on a substrate includes a lens array for forming an erect image of the object in response to the foreign object being illuminated by a light source, and a sensor array for reading the formed image of the object. The sensor array includes a plurality of pixels, with at least some of the pixels having a dead zone. The lens array and the sensor array are arranged such that the substrate and the photosensing surface of the sensor array are situated at positions separated by substantially the same distance from two conjugate points present when the lens array forms the erect image of the object. The arrangement results in the image being defocused on the sensor array such that a predetermined number of pixels sense the formed image of the object, thus assuring that the foreign object is detected even if the image is projected on a dead zone of a given pixel.

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