Image reading apparatus

Details Image reading apparatus Image reading apparatus

1989-03-29

1991-01-08

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

With means to inspect passive solid objects

2503601, 250341, 356446, G01N 2100, G01N 2101, G01N 2147

Patent

active

049838423

ABSTRACT:
An image reading apparatus comprises a light source for simultaneously radiating, onto a pattern formed by etching a plurality of recessed characters in a semiconductor wafer, an incoherent parallel slit light beam having a radiation spot of dimensions corresponding to those of a region to be measured, a CCD camera, having a light-receiving surface which is shifted from an optical axis of a regular reflection beam so as to receive a reflection beam offset from the regular reflection beam by the region to be measured, for measuring the pattern on the basis of the received beam, and a light-shielding plate, arranged between the light source and the member to be measured, for preventing a peripheral beam of the parallel slit light beam from being incident on the region to be measured.

REFERENCES:
patent: 4368979 (1983-01-01), Ruell
patent: 4502785 (1985-03-01), Truax
patent: 4615620 (1986-10-01), Noguchi et al.
patent: 4795906 (1989-01-01), Adams et al.

Affiliated with

Also associated with

Rating

Image reading apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Image reading apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Image reading apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-936542