Optical: systems and elements – Diffraction – Using fourier transform spatial filtering
Patent
1995-06-07
1997-05-20
Dzierzynski, Paul M.
Optical: systems and elements
Diffraction
Using fourier transform spatial filtering
359558, 359619, 355 53, 355 67, G02B 518, G02B 2746, G03B 2742, G03B 2754
Patent
active
056317735
ABSTRACT:
An edge emphasis type phase shift reticle is illuminated obliquely, and zeroth order diffraction light and first order diffraction light caused by a fine pattern of the reticle and having substantially the same intensity are incident and distributed on a pupil of a projection optical system, symmetrically with respect to a predetermined axis, whereby the fine pattern is imaged with use of the zeroth order diffraction light and first order diffraction light.
REFERENCES:
patent: 3771872 (1973-11-01), Nightingale et al.
patent: 3795446 (1974-03-01), Houston
patent: 3887816 (1975-06-01), Colley
patent: 4159164 (1979-06-01), Dammann et al.
patent: 4497015 (1985-01-01), Konno et al.
patent: 4521082 (1985-06-01), Suzuki et al.
patent: 4547037 (1985-10-01), Case
patent: 4634240 (1987-01-01), Suzuki et al.
patent: 4645924 (1987-02-01), Suzuki et al.
patent: 4668077 (1987-05-01), Tanak
patent: 4746958 (1988-05-01), Yamakawa
patent: 4777374 (1988-10-01), Nakata et al.
patent: 4780747 (1988-10-01), Suzuki et al.
patent: 4799791 (1989-01-01), Echizen et al.
patent: 4924257 (1990-05-01), Jain
patent: 4931830 (1990-06-01), Suwa et al.
patent: 4943733 (1990-07-01), Mori et al.
patent: 4947030 (1990-08-01), Takahashi
patent: 4947413 (1990-08-01), Jewell et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5061956 (1991-10-01), Takubo et al.
patent: 5067811 (1991-11-01), Ouchi
patent: 5097291 (1992-03-01), Suzuki
patent: 5121160 (1992-06-01), Sano et al.
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5153419 (1992-10-01), Takahashi
patent: 5160962 (1992-11-01), Miura et al.
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5194345 (1993-03-01), Rolfson
patent: 5237367 (1993-08-01), Kudo
patent: 5245384 (1993-09-01), Mori
patent: 5251067 (1993-10-01), Kamon
patent: 5253040 (1993-10-01), Kamon et al.
patent: 5264898 (1993-11-01), Kamon et al.
patent: 5286963 (1994-02-01), Torigoe
patent: 5287142 (1994-02-01), Kamon
patent: 5296892 (1994-03-01), Mori
patent: 5436692 (1995-07-01), Noguchi
Fukuda, et al., "Nikkei Microdevices", pp. 108 through 114, Jul. 1990.
Canon Kabushiki Kaisha
Chang Audrey
Dzierzynski Paul M.
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