Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2011-02-22
2011-02-22
Mehta, Bhavesh M (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S218000, C382S219000
Reexamination Certificate
active
07894660
ABSTRACT:
An alignment mark is arranged to be within an image screen and the alignment mark is formed with rectangular patterns having varied dimensions from each other. The signal waveforms from each of the rectangular patterns are measured. The number of the rectangular patterns with normal waveforms is compared to the minimum required number of marks prescribed beforehand. The amount of deviation in alignment is calculated by excluding the abnormal measured result.
REFERENCES:
patent: 4600309 (1986-07-01), Fay
patent: 4952060 (1990-08-01), Ina et al.
patent: 4971444 (1990-11-01), Kato
patent: 5402224 (1995-03-01), Hirukawa et al.
patent: 5418613 (1995-05-01), Matsutani
patent: 5674651 (1997-10-01), Nishi
patent: 5682243 (1997-10-01), Nishi
patent: 5808910 (1998-09-01), Irie et al.
patent: 5995199 (1999-11-01), Shinozaki et al.
patent: 6011611 (2000-01-01), Nomura et al.
patent: 6285033 (2001-09-01), Matsumoto
patent: 6317211 (2001-11-01), Ausschnitt et al.
patent: 6344896 (2002-02-01), Saito
patent: 6411386 (2002-06-01), Nishi
patent: 6481003 (2002-11-01), Maeda
patent: 6677088 (2004-01-01), Magome et al.
patent: 6961115 (2005-11-01), Hamatani et al.
patent: 7109483 (2006-09-01), Nakasuji et al.
patent: 2003/0090661 (2003-05-01), Kobayashi
patent: 57-026434 (1982-02-01), None
patent: 62-205623 (1987-09-01), None
patent: 4-186717 (1992-07-01), None
patent: 4-303914 (1992-10-01), None
patent: 8-274018 (1996-10-01), None
patent: 9-7929 (1997-01-01), None
patent: 9-74063 (1997-03-01), None
patent: 9-232202 (1997-09-01), None
patent: 10-319574 (1998-12-01), None
patent: 2000-21767 (2000-01-01), None
patent: 2000-156336 (2000-06-01), None
patent: 2000-323399 (2000-11-01), None
Japanese Office Action dated Nov. 28, 2006 with partial English Translation.
McGinn Intellectual Property Law Group PLLC
Mehta Bhavesh M
Renesas Electronics Corporation
Shah Utpal
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