Image pickup element and image pickup device having scribe lines

Details Image pickup element and image pickup device having scribe lines Image pickup element and image pickup device having scribe lines

1996-01-02

1997-12-16

Thomas, Tom

Active solid-state devices (e.g., transistors, solid-state diode

Physical configuration of semiconductor

With peripheral feature due to separation of smaller...

257222, 257223, 257233, 257234, 257229, 257258, 257291, H01L 27148, H01L 2980, H01L 23544

Patent

active

056988923

ABSTRACT:
In order to eliminate film thickness nonuniformity of filters and to attain a cost reduction by simultaneously performing planarizing processes of a scribe region and a photoelectric conversion portion, in a color solid-state image pickup device which is separated into a plurality of color solid-state image pickup chips each of which consists of a photoelectric conversion portion and a peripheral circuit portion thereof formed on a semiconductor substrate, a portion of a scribe region for separating the structure on the semiconductor substrate into the color solid-state image pickup chips has a layer structure having the same layers as the photoelectric conversion portion. This invention is also applied to a chip array type color solid-state image pickup device which is constituted by arranging, on a semiconductor substrate, a plurality of color solid-state image pickup chips, each having an array of a plurality of photoelectric conversion portions.

REFERENCES:
patent: 5135891 (1992-08-01), Ikeno et al.
patent: 5136354 (1992-08-01), Morita et al.
patent: 5432363 (1995-07-01), Kamsaka et al.
patent: 5537229 (1996-07-01), Brandestini et al.

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