Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2007-06-12
2007-06-12
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S052000
Reexamination Certificate
active
10901209
ABSTRACT:
An exposure method of forming pattern on object via projection optical system, including deciding optimal adjustment amount of adjustment device which adjusts image forming property of the projection optical system to optimize the image forming property under pattern to be formed and exposure condition of the pattern, based on information related to wavefront aberration of the projection optical system, Zernike Sensitivity Chart corresponding to the pattern and the exposure condition, wavefront aberration variation table that denotes relation between adjustment amount of the adjustment device and change in coefficients of terms in the Zernike polynomial, and restraint condition with respect to the adjustment amount of the adjustment device, and exposing the pattern on the object under the exposure condition via the projection optical system of which the image forming property is adjusted by the adjustment device based on the decided optimal adjustment amount.
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Hirukawa Shigeru
Matsuyama Tomoyuki
Shimizu Yasuo
Suzuki Kousuke
Fuller Rodney
Nikon Corporation
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