Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate
2008-07-29
2008-07-29
Fuller, Rodney E (Department: 2862)
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
C355S077000
Reexamination Certificate
active
07405803
ABSTRACT:
A second communications server obtains adjustment information of an adjustment unit in an exposure apparatus and information related to image forming quality (such as wavefront aberration) of a projection optical system under an exposure condition that serves as a reference, via a first communications server, and then calculates an optimal adjustment amount of the adjustment unit under a target exposure condition based on the information. In addition, the second communications server obtains adjustment information of the adjustment and actual measurement data of image forming quality of the projection optical system via the first communications server, and then calculates the optimal adjustment amount of the adjustment unit under the target exposure condition based on the information. And, the second communications server controls the adjustment unit in the exposure apparatus via the first communications server, based on the calculations results.
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Hirukawa Shigeru
Matsuyama Tomoyuki
Shimizu Yasuo
Suzuki Kousuke
Fuller Rodney E
Nikon Corporation
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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