Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-05-07
2008-11-04
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000, C355S077000, C359S286000
Reexamination Certificate
active
07446857
ABSTRACT:
An acousto-optic cell is used in a method and device for patterning a workpiece, for exposing a radiation sensitive layer on a workpiece such as a mask or a device substrate. The acousto-optic cell includes an array of transducers. The transducers may supply columns of ultrasound to the cell. They may produce a two dimensional modulation pattern within the cell. Electromagnetic radiation is modulated by the cell and related to a workpiece. The modulation of the cell may modulate the amplitude and/or phase of the electromagnetic radiation. In some embodiments, adjoining columns of ultrasound may be positioned so that portions of the electromagnetic radiation partially overlap and interfere, after they are modulated.
REFERENCES:
patent: 6060224 (2000-05-01), Sweatt et al.
patent: RE37309 (2001-08-01), Nakashima et al.
patent: 6285488 (2001-09-01), Sandstrom et al.
patent: 6312134 (2001-11-01), Jain et al.
patent: 6552779 (2003-04-01), Mei
patent: 6597430 (2003-07-01), Nishi et al.
patent: 6624878 (2003-09-01), Sandstrom et al.
patent: 6700600 (2004-03-01), Sandstrom et al.
patent: 6882477 (2005-04-01), Schattenburg et al.
patent: 2002/0021426 (2002-02-01), Mei et al.
patent: 2003/0096176 (2003-05-01), Miyamae et al.
patent: 2004/0159636 (2004-08-01), Sandstrom et al.
patent: 2005/0270631 (2005-12-01), Johnson
patent: 6095257 (1994-04-01), None
patent: 2001-291654 (2001-10-01), None
patent: WO-0118606 (2001-03-01), None
Born, M, et al. “Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light,” 7th edition, Cambridge University Press, 1999. pp. 313-325.
Written Opinion of the International Preliminary Examining Authority for International Application No. PCT/SE2003/000238 mailed on Feb. 2, 2004
“Reply to first written opinion of Feb. 2, 2004,” for International Application NO. PCT/SE2003/000238, dated Feb. 26, 2004.
International Preliminary Report on Patentability for International Application NO. PCT/SE2003/000238 completed May 4, 2004.
English translation of Office Action mailed Jun. 3, 2008 in corresponding Japanese Patent Application No. 2003-570186.
Beffel, Jr. Ernest J.
Haynes Beffel & Wolfeld LLP
Micronic Laser Systems AB
Rutledge Della J.
LandOfFree
Image forming method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Image forming method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Image forming method and apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4050018