Image forming method and apparatus

Details Image forming method and apparatus Image forming method and apparatus

2007-05-08

2007-05-08

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S071000, C355S077000, C378S034000, C378S035000, C250S492200

Reexamination Certificate

active

10505564

ABSTRACT:
The present invention relates to an apparatus for forming a pattern on a radiation sensitive material comprising a source to form a radiation beam, a scanning element to scan at least one beam from said radiation source over said radiation sensitive material, a modulator to modulate said at least one beam during scanning according to an input pattern data file, where said modulation of the beam creates a coherent sub-image on the workpiece and several sub-images are non-coherently superposed to create a final image. The invention also relates to a method of patterning a workpiece and a workpiece as such.

REFERENCES:
patent: 6060224 (2000-05-01), Sweatt et al.
patent: RE37309 (2001-08-01), Nakashima et al.
patent: 6285488 (2001-09-01), Sandstrom
patent: 6312134 (2001-11-01), Jain et al.
patent: 6597430 (2003-07-01), Nishi et al.
patent: 2004/0159636 (2004-08-01), Sandstrom et al.

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