Image farming and microdevice manufacturing method and exposure

Details Image farming and microdevice manufacturing method and exposure Image farming and microdevice manufacturing method and exposure

1995-06-06

1997-09-30

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742

Patent

active

056731027

ABSTRACT:
An exposure apparatus for and a method of forming an image of a fine pattern having linear features extending in orthogonal first and second directions. The apparatus includes an illumination optical system for illuminating the pattern. The illumination optical system includes a device for forming a secondary light source having decreased intensity portions at a center thereof and on first and second intersecting axes defined along the first and second directions, respectively. A projection optical system projects, on an image plane, an image of the pattern illuminated with light from the light source. The light source includes four sections having substantially the same intensity and being distributed in the four quadrants defined by the axes. An image of the light source is projected onto a pupil of the projection optical system. On the assumption of a coordinate system defined X and Y-axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is one, coordinates of centers of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

REFERENCES:
patent: 3887816 (1975-06-01), Colley
patent: 4497015 (1985-01-01), Konno et al.
patent: 4521082 (1985-06-01), Suzuki et al.
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4634240 (1987-01-01), Suzuki et al.
patent: 4645924 (1987-02-01), Suzuki et al.
patent: 4789222 (1988-12-01), Ota et al.
patent: 4924257 (1990-05-01), Jain
patent: 4931830 (1990-06-01), Suwa et al.
patent: 4947030 (1990-08-01), Takahashi
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5061956 (1991-10-01), Takubo et al.
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5153419 (1992-10-01), Takahashi
patent: 5237367 (1993-08-01), Kudo
patent: 5251067 (1993-10-01), Kamon
patent: 5253040 (1993-10-01), Kamon et al.

Affiliated with

Also associated with

Rating

Image farming and microdevice manufacturing method and exposure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Image farming and microdevice manufacturing method and exposure , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Image farming and microdevice manufacturing method and exposure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2260752