Image display unit and method of manufacturing the same

Details Image display unit and method of manufacturing the same Image display unit and method of manufacturing the same

2007-06-05

2007-06-05

Shankar, Vijay (Department: 2629)

Computer graphics processing and selective visual display system

Display driving control circuitry

C345S206000, C345S207000, C345S212000

Reexamination Certificate

active

10421945

ABSTRACT:
An MEM unit according to the invention comprises an Si (silicon) substrate1having such a thickness as to transmit a visible light therethrough, an insulating layer2formed in contact with the upper surface of the Si substrate1, a lower electrode layer3formed in contact with the upper surface of the insulating layer2, a sacrificial layer gap4of a space formed in the partial region of the upper surface of the lower electrode layer3, a movable film5formed on the upper surface of the lower electrode layer3to cover the sacrificial layer gap4, an upper electrode6formed in contact with the upper part of the movable film5, a contact hole7penetrating to reach the surface of the lower electrode layer3from the surface of the movable film5, and a lower electrode8formed from the surroundings of the upper part of the contact hole7to the surface of the lower electrode layer3through the contact hole7.

REFERENCES:
patent: 5182665 (1993-01-01), O'Callaghan et al.
patent: 5451977 (1995-09-01), Kusuda et al.
patent: 5552916 (1996-09-01), O'Callaghan et al.
patent: 6998644 (2006-02-01), Boling et al.
patent: 2002/0021479 (2002-02-01), Scalora et al.
patent: 2002/0054424 (2002-05-01), Miles
patent: 2002/0070931 (2002-06-01), Ishikawa
patent: 2003/0043157 (2003-03-01), Miles

Affiliated with

Also associated with

Rating

Image display unit and method of manufacturing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Image display unit and method of manufacturing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Image display unit and method of manufacturing the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3835432