Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2005-04-11
2008-09-09
Hoang, Quoc D (Department: 2892)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S451000, C257S233000, C257SE21359, C257SE27155
Reexamination Certificate
active
07422924
ABSTRACT:
The invention provides a photodiode with an increased charge collection area, laterally spaced from an adjacent isolation region. Dopant ions of a first conductivity type with a first impurity concentration form a region surrounding at least part of the isolation region. These dopant ions are further surrounded by dopant ions of the first conductivity type with a second impurity concentration. The resulting isolation region structure increases the capacitance of the photodiode by allowing the photodiode to possess a greater charge collection region while suppressing the generation of dark current.
REFERENCES:
patent: 6069058 (2000-05-01), Hong
patent: 6417074 (2002-07-01), Kopley et al.
patent: 6569700 (2003-05-01), Yang
patent: 6794698 (2004-09-01), Perng et al.
patent: 2003/0211701 (2003-11-01), Desko et al.
Dickstein & Shapiro LLP
Hoang Quoc D
Micro)n Technology, Inc.
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