Image detection apparatus

Details Image detection apparatus Image detection apparatus

1999-03-01

2000-08-01

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

3562374, 3562375, G01N 2100

Patent

active

060974834

ABSTRACT:
An image detection apparatus (10) having an illumination system (IS) irradiates light onto the surface (30S) of an object 30 to be inspected for defects. A detection optical system (34) condenses the light from the surface and forms an image of the surface on an image detector (48). The detection optical system includes a receiving mirror (38) having an optical axis (A.sub.38) that intersects the reference optical axis (A.sub.34) of the detection optical system. A processing apparatus (60) includes a processing system (62) that performs image processing based on an output from the detector corresponding to the image. The processing system includes an image distortion correction unit (62a) for eliminating the effects of distortion in the image of the surface generated by the inclination of the surface with respect to the reference optical axis and the receiving mirror.

REFERENCES:
patent: 5218415 (1993-06-01), Kawashima
patent: 5510892 (1996-04-01), Mizutani et al.
patent: 5535005 (1996-07-01), Mukherjee-Roy et al.
patent: 5587794 (1996-12-01), Mizutani et al.

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