Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2007-07-19
2008-08-19
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
C382S145000
Reexamination Certificate
active
07415362
ABSTRACT:
An image defect inspection apparatus which performs a defect detection for detecting a defect on a surface of a sample by comparing corresponding portions in a captured image of the surface of the sample. The apparatus includes a plurality of processor elements which perform the defect detection in parallel on regions created by dividing the captured image; and a processor unit, which receives defect information in parallel from the plurality of processor elements as information concerning individual defects detected by the processor elements, and outputs the defect information as a set of defect information. Each individual one of the processor elements performs a reexamination on the defect detected by the individual processor element, before sending the defect information to the processor unit.
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patent: 7275006 (2007-09-01), Tsuji et al.
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patent: 2006/0215902 (2006-09-01), Shibuya et al.
patent: 2004-177397 (2004-06-01), None
patent: 2004-273850 (2004-09-01), None
patent: 2005-134976 (2005-05-01), None
Patent Abstracts of Japan, Publication No. 2004177397 A; Date of Publication: Jun. 24, 2004; in the name of Akio Ishikawa.
Patent Abstracts of Japan, Publication No. 2004273850 A; Date of Publication: Sep. 30, 2004; in the name of Naoya Takeuchi.
Patent Abstracts of Japan, Publication No. 2005134976 A; Date of Publication: May 26, 2005; in the name of Yoshiyuki Momiyama et al.
Bui Bryan
Christie Parker & Hale LLP
Tokyo Seimitsu Co. Ltd.
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