Image analysis – Image sensing – Sensor control
Reexamination Certificate
2004-10-18
2008-10-21
Do, Anh Hong (Department: 2624)
Image analysis
Image sensing
Sensor control
C382S305000, C382S158000
Reexamination Certificate
active
07440640
ABSTRACT:
A system having a sensor array adapted to provide image data. A process node is connected to the sensor array, and analyzes portions of the image data. A job manager is connected to the process node, and instructs the process node to send the portions of the image data to a storage node. The storage node receives and stores the sent portions of the image data. In this manner, image data can be stored and run multiple times in order to tune a recipe for the analysis system. Because the same image data can be used over and over again, the recipe creating process can be more finely tuned to detect both the types of defects and at a level that is desired.
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Bhaskar Krishnamurthy
Lin Jason Z.
Roulo Mark J.
Do Anh Hong
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
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