Image-based three-axis positioner for laser direct write microch

Details Image-based three-axis positioner for laser direct write microch Image-based three-axis positioner for laser direct write microch

1994-10-26

2000-03-07

Padgett, Marianne

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

427 8, 427582, 427586, 427596, 356 2, 356376, 356381, 374137, C23C 1648, C23C 800, G01C 1112, G01K 300

Patent

active

060337214

ABSTRACT:
Apparatus for determining a best trajectory for laser CVD through a strategy of acquiring a series of two-dimensional plane images of the substrate. These images, taken together, contain topographical information as well as local reflectivity and thermal mapping information. The images are combined in digital format with additional substrate mapping information to calculate a best three-dimensional trajectory for the desired laser operation. The technique is especially suitable for compensation of tilt or severe height variation on microelectronic parts. The apparatus can deposit platinum conductors on integrated circuits by pyrolytic deposition from Pt(PF.sub.3).sub.4 vapor.

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