Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-01-25
2005-01-25
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500
Reexamination Certificate
active
06847442
ABSTRACT:
Illuminator apparatus for illuminating a workpiece during visual testing thereof, the illuminator comprising: a source of illumination that illuminates a portion of the workpiece with on-axis illumination centered at a first angular direction and having a first intensity and with off-axis illumination having a second intensity; and an optical viewing system, that views said portion of the workpiece and accepts light reflected from the workpiece over a range of angular directions, centered at a second angular direction, said range of angular directions defining said on-axis illumination, wherein said first intensity and second intensity art separately adjustable and wherein the first angular direction is different from the second angular direction.
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Arnon Oded
Gross Avraham
Katzir Yigal
Negry Shabtai
Teichman Eyal
Orbotech Ltd.
Pham Hoa Q.
Sughrue & Mion, PLLC
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