Radiant energy – Irradiation of objects or material
Patent
1994-11-29
1996-04-16
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
250504R, G01J 100, A61N 500, G21G 500
Patent
active
055085288
ABSTRACT:
An imaging apparatus and an illumination unit for use in such an apparatus are described, which unit comprises an illumination housing (LH) accommodating a radiation source (LA) and at least a reflector (RL). To prevent a decrease of the radiation power supplied by the illumination housing, this housing is provided with means (LA, SH, L.sub.29) which prevent a diffuse deposit of silicon-containing particles present in the ambient air from being formed on optical components within the illumination housing.
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Mulkens Johannes C. H.
Stoeldrayer Judocus M. D.
Van Hijningen Nicolaas C. J. A.
Anderson Bruce C.
ASM Lithography B.V.
Miller Paul R.
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