Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1996-07-25
2000-02-22
Gray, David M.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, 359209, 359211, G03B 2742, G03B 2754, G02B 2608
Patent
active
060286601
ABSTRACT:
Illumination unit (2) for an optical system, including an illumination system (1) which comprises, in this order, a radiation source (3) and a first optical integrator (11). The illumination unit (2) further comprises a detection system (45) including a radiation-sensitive detector (47). The illumination system (1) comprises a second optical integrator (13). The two integrators (11, 13) enclose a prism system (15) comprising at least one prism (17). The prism system (15) has a coupling-out surface via which light can be coupled out of the illumination system (1), and an exit surface via which light can be coupled out of the prism system (15), without the intensity in the main light path being essentially influenced. The detection system (45) is arranged proximate to the exit surface of the prism system (15) and comprises light-integrating means.
REFERENCES:
patent: 5309198 (1994-05-01), Nakagawa
patent: 5343270 (1994-08-01), Sakakibara et al.
patent: 5798824 (1998-08-01), Kudo
"Optics Guide 3", Melles Griot, Irvine, CA. 1985, pp. 238-239. no date (month).
Mulkens Johannes C. H.
Stoeldrayer Judocus M. D.
Van Der Laan Hans
ASM Lithography B.V.
Gray David M.
Kim Peter B.
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