Illumination system for optical inspection

Details Illumination system for optical inspection Illumination system for optical inspection

2008-04-09

2011-12-13

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237600, C356S239300, C356S239700, C382S144000, C382S152000

Reexamination Certificate

active

08077307

ABSTRACT:
Apparatus for optical inspection includes an illumination assembly, including multiple parallel rows of light sources for emitting light and illumination optics associated with each row for directing the light onto an object under inspection. The multiple parallel rows include at least a first row with first illumination optics including a first array of prisms that are configured to reflect the light emitted by the light sources in the first row, and at least a second row with second illumination optics including a second array of prisms that are configured to refract the light emitted by the light sources in the second row. An imaging assembly is configured to capture an image of the object under illumination by the multiple parallel rows of the light sources.

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