Illumination system for illuminating a patterning device and...

Details Illumination system for illuminating a patterning device and... Illumination system for illuminating a patterning device and...

2011-02-15

2011-02-15

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07889321

ABSTRACT:
An illumination system includes a housing, and an optical system located within the housing. The optical system includes at least one optical element. The optical system is constructed and arranged to illuminate a patterning device with a radiation beam diverging from an intermediate focus. The intermediate focus is located at a position substantially at the same level or below a bottom portion of the illumination system.

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