Illumination system for Half-Field Dyson stepper

Details Illumination system for Half-Field Dyson stepper Illumination system for Half-Field Dyson stepper

1992-12-21

1994-04-12

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 1, 355 67, G03B 2742

Patent

active

053030010

ABSTRACT:
An illumination system for use in a unit magnification optical projection system (such as a Half-Field Dyson system) is provided. In a Half-Field Dyson system, a reticle and a wafer are parallel to each other with a window being provided on the reticle to allow for projection of the reticle pattern onto the wafer. The present invention provides uniform bright illumination over the reticle pattern with little or no spill over through the reticle window.

REFERENCES:
patent: 4742376 (1988-05-01), Phillips
patent: 4899195 (1990-02-01), Gotoh
patent: 4964705 (1990-10-01), Markle
patent: 5003345 (1991-03-01), Markle
patent: 5028955 (1991-07-01), Hayashida et al.
patent: 5040882 (1991-08-01), Markle
patent: 5150173 (1992-09-01), Isobe et al.
patent: 5164794 (1992-11-01), Markle
patent: 5168021 (1992-12-01), Arai et al.
patent: 5168304 (1992-12-01), Hattori
patent: 5229811 (1993-07-01), Hattori et al.

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