Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-08-16
2011-08-16
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
Reexamination Certificate
active
07999917
ABSTRACT:
The disclosure relates an illumination system configured to guide illumination light from a radiation source to an object plane and to provide defined illumination of an object field in the object plane, wherein illumination light is supplied to the object field by a bundle-guiding optical pupil component which is disposed in a pupil plane of the projection objective, and wherein at least another bundle-guiding component is disposed upstream of the pupil component in the beam path of the illumination light. The disclosure further concerns a projection exposure apparatus that includes such an illumination system of this type, a method of fabricating a microstructured component using such a projection exposure apparatus, and a microstructured component fabricated using such a method.
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Office Action for corresponding Application No. JP 2008-529565, dated Dec. 7, 2009.
English translation of Office Action for corresponding Application No. JP 2008-529565, dated Feb. 21, 2011.
Mann Hans-Juergen
Zellner Johannes
Carl Zeiss SMT GmbH
Fish & Richardson P.C.
Glick Edward
Persaud Deoram
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