Illumination system and method employing a deformable mirror and

Details Illumination system and method employing a deformable mirror and Illumination system and method employing a deformable mirror and

1995-05-24

1997-11-04

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 68, 355 71, G03B 2772, H01L 2130

Patent

active

056845669

ABSTRACT:
An illumination system for use in photolithography using a laser or radiation beam source. A deformable mirror is used to shape the beam of laser radiation to obtain global uniformity. A profile sensing means is used to detect any global non-uniformities. The output of this sensing means is fed to a controller for calculating a mirror contour and controlling actuators that shape the deformable mirror to obtain a globally uniform intensity. A diffractive or diffusive optical element, such as a microlens array, eliminates local non-uniformities. Movement of this element eliminates speckle caused by interference due to the coherent beam source. A uniform intensity profile and appropriate angular spread is achieved with very little transmission loss and is automatically compensated for degraded or changing source performance. The illumination system is particularly applicable to a scanning photolithography process as used in the manufacture of semiconductor substrates.

REFERENCES:
patent: 4091274 (1978-05-01), Angelbeck et al.
patent: 4516832 (1985-05-01), Jain et al.
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4773748 (1988-09-01), Shih
patent: 4918583 (1990-04-01), Kudo et al.
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 4994580 (1991-02-01), MacDonald et al.
patent: 5237367 (1993-08-01), Kudo
patent: 5245384 (1993-09-01), Mori
patent: 5296892 (1994-03-01), Mori
patent: 5300971 (1994-04-01), Kudo
patent: 5320918 (1994-06-01), Raab et al.
patent: 5479289 (1995-12-01), Fisli
patent: 5482818 (1996-01-01), Nelson

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